Catadioptric reduction objective
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United States of America Patent
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N/A
Issued Date -
Sep 1, 2005
app pub date -
Dec 23, 2004
filing date -
Jun 25, 2002
priority date (Note) -
Abandoned
status (Latency Note)
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Abstract
A catadioptric projection objective for projecting a pattern, which is located in the object plane of the projection objective, into the image plane of the projection objective has, between the object plane and the image plane, a catadioptric objective part provided with a concave mirror (17), with a first deviating mirror (16) and with at least one second deviating mirror (19). A polarization rotating device (26) rotates the preferred polarization direction of the light approximately 90.degree. inside the light path between the deviating mirrors. This permits an at least partial compensation for polarization-dependent reflectivity differences and phase effect differences of the deviating mirrors thereby enabling a projection with a largely identical contrast for all structural directions.
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