Stamper original and its manufacturing method, stamper and its manufacturing method, and optical disk
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United States of America Patent
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Issued Date -
Aug 18, 2005
app pub date -
Apr 12, 2005
filing date -
Apr 15, 2002
priority date (Note) -
Abandoned
status (Latency Note)
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Abstract
An object of the present invention is to provide a stamper preform and others capable of obviating an Ni electroforming step taking a long time and readily producing a defective in production of a stamper and capable of forming an accurate and fine pattern of projections and indentations. A stamper preform 11 of the present invention has a base 1, a semi-crosslinked resist layer 2, and a prebaked resist layer 3 stacked in this order. The prebaked resist layer 3 contains a methoxymethyl melamine and bumps are readily formed therein by exposure and development (FIG. 1C).
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