Grating element for filtering wavelengths < 100 nm
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United States of America Patent
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app pub date -
Sep 21, 2004
filing date -
Mar 21, 2002
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Abandoned
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Abstract
There is provided a grating apparatus for filtering wavelengths .ltoreq.100 nm. The grating apparatus includes multiple individual grating elements having grating lines. The individual grating elements are positioned one behind another on a curved support surface in relation to a plane spanned by the grating apparatus in a direction of beans of a light bundle that is incident on the grating apparatus.
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