Process for manufacturing component parts, use of same, with air bearing supported workpieces and vacuum processing chamber
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United States of America Patent
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app pub date -
Jun 23, 2003
filing date -
Feb 19, 1999
priority date (Note) -
Abandoned
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Abstract
A vacuum treatment chamber generates disk-shaped workpieces with directly bondable surface. The chamber is a stand-alone chamber in ambient atmosphere and has a plasma discharge section. A gas supply is operatively connected with a gas tank arrangement predominantly containing nitrogen. A workpiece holding arrangement is formed by a magazine with a multitude of slits, each for a workpiece to be simultaneously treated in said vacuum treatment chamber.
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