Semiconductor manufacturing system, work manufacturing system, and conveyance system
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United States of America Patent
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Issued Date -
Jul 7, 2005
app pub date -
Jan 7, 2005
filing date -
Jan 7, 2004
priority date (Note) -
Abandoned
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Abstract
A semiconductor manufacturing system in a clean room is composed of a combination of a flow shop section and a job shop section. The flow shop section is composed of a quasi flow shop section and a quasi job shop section. In the quasi flow shop section, manufacturing apparatuses are arranged respectively so that a difference between processing ability of the manufacturing apparatuses is taken into consideration and a balance in productivity is achieved. In the quasi job shop section, manufacturing apparatuses are arranged respectively so that the balance in productivity is not achieved due to low or high processing ability of the manufacturing apparatuses, and are provided so as to be shared by the quasi flow shop section. Accordingly, a difference between the processing ability of the manufacturing apparatuses can be reduced and the cycle time can be significantly reduced.
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