Method and apparatus for forming thin film of organic electroluminescent device
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United States of America Patent
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Issued Date -
Jul 7, 2005
app pub date -
Aug 3, 2004
filing date -
Jan 6, 2004
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Abandoned
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Abstract
A method for forming a thin film layer of an organic electroluminescent device is disclosed. The method is adapted to form a patterned film on a substrate. The method first provides a mask. Then, an alignment process is performed to align the substrate and the mask under non-vacuum environment, and the substrate and the mask are fastened. The substrate and the mask are transferred in vacuum environment so that the patterned film can be formed on the substrate. In the method mentioned above, the throughput thereof will be improved.
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