Structure and method for protecting substrate of an active area
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United States of America Patent
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N/A
Issued Date -
Jun 30, 2005
app pub date -
Jun 10, 2004
filing date -
Dec 29, 2003
priority date (Note) -
Abandoned
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Abstract
A structure and method are provided for protecting a substrate of an active area adjacent to an isolation region. A substrate including an isolation region is provided, wherein a gate is disposed on the substrate adjacent to the isolation region. A sacrificial protective layer is deposited on the substrate and then etched back to form a sidewall protective layer on the sidewall of the gate, covering a portion of isolation region to protect the substrate adjoining the gate and the isolation region.
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