Brittle material rotating and aligning mechanism for use in a brittle material scribing and/or breaking apparatus
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United States of America Patent
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Jun 20, 2006
Issued Date -
N/A
app pub date -
Feb 28, 2005
filing date -
Nov 18, 2002
priority date (Note) -
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Abstract
A brittle material rotating and aligning mechanism including a bearing, a rotary table, and a driving mechanismU, and installed in the worktable of a brittle material scribing and breaking apparatus; carries brittle material, for example, a semiconductor wafer for scribing and breaking into individual dies. The driving mechanism uses a flexible transmission member to rotate the rotary table for low installation cost, no requirement for a precision adjustment during installation, and, preventing the occurrence of back lash or the production of particles due to friction between the transmission member and the driving wheel of the driving mechanism, or between the transmission member and the rotary table.
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