Jig for microscopic inspection of bulk micro defects in single crystals
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United States of America Patent
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Issued Date -
Jun 16, 2005
app pub date -
Dec 12, 2003
filing date -
Dec 12, 2003
priority date (Note) -
Abandoned
status (Latency Note)
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Abstract
A jig for holding a Czochralski grown crystalline sample for optical microscopic inspection is disclosed. The jig can be mounted on another inspection jig typical of the semiconductor industry, or can be mounted directly on the base plate of the optical microscope. Spring tensioned clamps allow for fast and easy placement of the inspection sample into the jig, with the jaws being aligned parallel to one adjustment axis of the microscope to limit microscope adjustment to one axis.
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