Laser crystallization apparatus and laser crystallization method
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United States of America Patent
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Dec 2, 2004
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Dec 4, 2003
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Abstract
The present invention relates to a laser crystallization apparatus and a laser crystallization method that can achieve high throughput even when a CW laser is used. The laser crystallization apparatus includes a movable stage supporting a substrate on which a semiconductor layer is formed, a device directing a laser beam to a plurality of optical paths in a time-division manner, and optical devices condensing and applying the laser beam passing through the optical paths to the semiconductor layer on the substrate supported by the stage. A first region of the semiconductor layer is scanned with the laser beam in one direction and a second region of the semiconductor layer is scanned with the laser beam in the reverse direction.
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