Light detector with enhanced quantum efficiency

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United States of America Patent

APP PUB NO 20050116144A1
SERIAL NO

10939118

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Abstract

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A semiconductor-based, especially a silicon-based, light detector, comprising a detector body (1.1) having a detector surface (1.2) and a covering layer (2) which comprises at least one first layer (2.1) and which is arranged on the detector surface (1.2), wherein, to enhance the quantum efficiency, the covering layer (2) has a transmittance in at least one working wavelength range which is higher than the transmittance of a covering layer consisting of SiO.sub.2 of the same thickness.

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Patent Owner(s)

Patent OwnerAddress
CARL ZEISS SMS GMBH07745 JENA

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Bauer, Harry Aalen, DE 9 50
Hartung, Frank Schorndorf, DE 35 921
Paul, Jochen Aalen, DE 4 0

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