Polish pad tool
Number of patents in Portfolio can not be more than 2000
United States of America Patent
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N/A
Issued Date -
Apr 28, 2005
app pub date -
Oct 24, 2003
filing date -
Oct 24, 2003
priority date (Note) -
Abandoned
status (Latency Note)
Importance
Abstract
A tool for lifting a pad, such as a CMP polish pad, is provided that includes a jaw that has an upper jaw portion and a lower jaw portion. The lower jaw portion has a sloped upper surface for slidably receiving a portion of the pad. A first member is pivotally coupled to the jaw. A second member is pivotally coupled to the first member. The second member has a surface opposite to the sloped surface of the lower jaw portion. The surface is operable to clamp the portion of the pad against the sloped surface when the first member is pivoted upwards.
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