Spectral measurnig device

Number of patents in Portfolio can not be more than 2000

United States of America Patent

APP PUB NO 20050087690A1
SERIAL NO

10500046

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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A holder (30) that holds a specimen (100) is disposed outside a vacuum chamber (50) with a light transmission window (52a). A light detection unit and a light radiation unit having a terahertz light generator (6) are fixed on a base (53) disposed inside the vacuum chamber. The light radiation unit irradiates terahertz pulse light onto the specimen (100) placed outside the vacuum chamber via the light transmission window (52a) and the resulting specimen light from the specimen (100) is received at the light detection unit via the light transmission window (52a). The base (53) in the vacuum chamber and the holder (30) disposed outside the vacuum chamber are connected via a connecting member (54a) passing displaceably through a barrier wall of a vacuum chamber (50) with airtight sealing so as to fix the relative position of the holder to the base.

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Patent Owner(s)

Patent OwnerAddress
NIKON CORPORATION12-1 YURAKUCHO 1-CHOME CHIYODA-KU TOKYO 100-8331
TOCHIGI NIKON CORPORATIONOTAWARA-SHI TOCHIGI 3248625

International Classification(s)

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Iwamoto, Toshiyuki Hachiaji-shi, JP 45 714
Usami, Mamoru Kawasaki-shi, JP 49 275

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