Methods and apparatus for the production of optical filters
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United States of America Patent
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app pub date -
Nov 14, 2003
filing date -
Jan 31, 2001
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Abandoned
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Abstract
Methods are provided for production of optical filters that include alternating exposures of a surface of a substrate to two or more precursors that combine to form a sublayer on the surface. A measurement light flux is provided to measure an optical property of the sublayer or an assemblage of sublayers. Based on the measurement, the number of sublayers is selected to produce an optical filter, such as a Fabry-Perot filter, having predetermined properties.
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