Non-contact orbit control system for Czochralski crystal growth
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United States of America Patent
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Issued Date -
Apr 28, 2005
app pub date -
Oct 22, 2003
filing date -
Oct 22, 2003
priority date (Note) -
Abandoned
status (Latency Note)
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Abstract
A Czochralski single crystal pulling apparatus having a one or more flow nozzles used to reduce or eliminate unwanted orbital motion during crystal growth. A portion of the purge gas supplied to the crystal puller is diverted to the flow nozzles, which direct purge gas flow on the growing crystal in a direction that counteracts the orbital force. Mass flow controllers and/or valves are actuated by a controller such that flow is only directed by any flow nozzle when the crystal is in a perigree interval relative to that nozzle, with the proper amount of purge gas directed such that orbit can be significantly reduced or eliminated.
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