Laser system sealing
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United States of America Patent
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N/A
Issued Date -
Apr 21, 2005
app pub date -
Oct 12, 2004
filing date -
Oct 17, 2003
priority date (Note) -
Abandoned
status (Latency Note)
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Abstract
The lifetime of the laser gas in a laser system such as an excimer laser can be increased by changing the way in which the laser system is sealed. In addition to primary seals used to seal the reservoir chamber and discharge channel, at least one secondary seal can be used between the primary seals and the surrounding environment in order to further prevent permeation of impurities into the discharge chamber, as well as to create an intermediate gas volume. A controlled atmosphere can be generated in the intermediate gas volume, which can be at a slightly higher pressure than the surrounding environment in order to resist the flow of impurities through the secondary seal(s). Further, a flow of purge gas can be introduced into the controlled atmosphere in order to carry away any impurities that leak through the secondary seal(s).
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