Fluid injection nozzle
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United States of America Patent
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Issued Date -
Apr 21, 2005
app pub date -
Jun 10, 2004
filing date -
Oct 17, 2003
priority date (Note) -
Abandoned
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Abstract
A fluid injection nozzle for treating a substrate includes a first plate having a first tip, and a second plate having a second tip, the second tip being coupled to the first plate by a fastener. The first and second plates define a fluid channel, and the first and second tips have lengths different from each other.
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