Sensing diaphragm for a differential pressure sensor with over-pressure protection and methods
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United States of America Patent
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Issued Date -
Apr 21, 2005
app pub date -
Sep 3, 2004
filing date -
Sep 5, 2003
priority date (Note) -
Abandoned
status (Latency Note)
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Abstract
A differential pressure sensor includes a housing having first and second housing members. The first and second housing members define opposing sections of a pressure chamber. The differential pressure sensor also includes a multi-layer laminate forming a pressure sensing diaphragm. The diaphragm is positioned between the first and the second housing members such that it generally bisects the pressure chamber into first and second chamber sections such that a pressure differential between the chamber sections causes the diaphragm to deflect toward the chamber section having the lower pressure. The first and second housing members are positioned to provide an overpressure stop that limits deflection of the diaphragm beyond a predetermined deflection limit.
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