INTEGRATED PRESSURE CONTROL SYSTEM FOR WORKPIECE CARRIER
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United States of America Patent
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N/A
Issued Date -
Mar 31, 2005
app pub date -
Sep 30, 2003
filing date -
Sep 30, 2003
priority date (Note) -
Abandoned
status (Latency Note)
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Abstract
An integrated pressure control system for a workpiece carrier includes a multizone carrier workpiece having multiple pressurizable zones and a pressure control system mounted to the carrier for controlling pressure provided to the pressurizable zones. The present invention also includes a workpiece carrier having a housing, a workpiece bladder coupled to the housing, and at least one pressure transducer mounted to the carrier housing for controlling pressure provided to the workpiece bladder.
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