Z-axis angular rate micro electro-mechanical systems (MEMS) sensor
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United States of America Patent
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Issued Date -
Mar 31, 2005
app pub date -
Jul 15, 2004
filing date -
Sep 25, 2003
priority date (Note) -
Abandoned
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Abstract
An oscillatory angular rate MEMS sensor is described for sensing rotation about the 'Z-axis'. Embodiments are either coupled-mass tuning-fork or single oscillating-mass in nature. The sensor includes mechanical and electrical function integration, and is preferably manufactured by a unique MEMS fabrication process.
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