Scroll pump using isolation bellows and synchronization mechanism
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United States of America Patent
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Issued Date -
Mar 24, 2005
app pub date -
Sep 18, 2003
filing date -
Sep 18, 2003
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Abandoned
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Abstract
Vacuum pumping apparatus includes a scroll set having an inlet and an outlet, the scroll set including a stationary scroll element and an orbiting scroll element, and a drive mechanism for producing orbiting motion of the orbiting scroll element relative to the stationary scroll element. The vacuum pumping apparatus further includes a bellows assembly coupled between a first stationary component of the apparatus and the orbiting scroll element so as to isolate a first volume inside the bellows assembly and a second volume outside the bellows assembly. One end of the bellows assembly is free to rotate during motion of the orbiting scroll element. The apparatus also includes a synchronization mechanism coupled between the orbiting scroll element and a second stationary component of the apparatus. The synchronization mechanism is located within the first volume.
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