Electrostatic comb drive actuator, and optical controller using the electrostatic comb drive actuator

Number of patents in Portfolio can not be more than 2000

United States of America Patent

APP PUB NO 20050052723A1
SERIAL NO

10895290

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Abstract

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An electrostatic comb drive actuator, characterized in that plural outer suspended elastic beams 2a and 2b are disposed in parallel to and outside plural inner suspended elastic beams 1a and 1b disposed in parallel to each other; the ends of the inner suspended elastic beams and the outer suspended elastic beams on both sides are connected with end connecting beams 3a and 3b; the outer suspended elastic beams are supported at their centers on a board 5; the inner suspended elastic beams are connected with each other at their centers by means of a working section 6; a movable comb electrode 7 is supported on the working section; and a fixed comb electrode 8 is supported on the board.

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Patent Owner(s)

Patent OwnerAddress
MORITEX CORPORATIONTOKYO
MASAYOSHI ESASHI1-11-9 YAGIYAMA-MINAMI TAIHAKU-KU SENDAI-SHI MIYAGI ESASHI MASAYOSHI 982-0807

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Esashi, Masayoshi Sendai-shi, JP 67 1403
Horio, Koji Yokohama-shi, JP 5 56
Muta, Kenichi Yokohama-shi, JP 7 98
Watanabe, Shin-Ichiro Yokohama-shi, JP 1 27

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