Multi-tool manager
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United States of America Patent
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N/A
Issued Date -
Mar 10, 2005
app pub date -
Jul 14, 2004
filing date -
Jul 14, 2003
priority date (Note) -
Abandoned
status (Latency Note)
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Abstract
A semiconductor inspection system comprises a first inspection tool communicatively coupled to a network, a second inspection tool communicatively coupled to the network, and a multi-tool manager communicatively coupled to the network. The multi-tool manager is configured to monitor the first inspection tool and the second inspection tool through the network.
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