Apparatus and method for determining temperatures at which properties of materials change

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United States of America Patent

APP PUB NO 20050037499A1
SERIAL NO

10639003

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Abstract

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An analytical measurement system includes a sample holder, a temperature changing device for changing the temperature of a sample on the sample holder, and a measurement device for detecting a change in the sample such as a phase change. The sample holder can be a micro sample holder including a support member having an aperture, a membrane spanning the aperture, and a backing layer attached to a backside of the membrane. The temperature changing device can be a laser directed at the backside of the sample holder or an electrical resistive heater on the sample holder. The measurement device senses changes in the sample such as the film stress, viscosity, or surface reflectivity, by measuring changes in scattered light, reflected light, emitted light, or electrical resistance.

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Patent Owner(s)

Patent OwnerAddress
FREESLATE INC415 OAKMEAD PARKWAY SUNNYVALE CA 94085

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Guan, Shenheng Palo Alto, CA 26 1407
Lee, David La Mirada, CA 405 5789
Nguyen, Sum Fremont, CA 4 85
Ramberg, C Eric San Jose, CA 17 345
Wang, Youqi Atherton, CA 24 526

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