Device for treating objects by plasma deposition
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United States of America Patent
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N/A
Issued Date -
Feb 10, 2005
app pub date -
Jun 16, 2004
filing date -
Dec 20, 2001
priority date (Note) -
Abandoned
status (Latency Note)
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Abstract
A device for treating objects by plasma deposition, comprising: a sealed treatment chamber (1), at a reduced pressure, provided on one of its walls (4) with a passage (2) that can be closed off, said passage (2) allowing objects for treatment (3) to be conveyed into and out of the treatment chamber (1), a transfer space (5) which can be placed, via said passage (2), in communication with the treatment chamber (1) so that objects for treatment (3) are introduced into the transfer space (5) prior to being introduced into the treatment chamber (1), the device being characterized in that the transfer space (5): is delimited by discontinuous walls (6,7), is able to move relative to the treatment chamber (1) so as to be able to negotiate the passage (2) of the treatment chamber (1).
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