Method of depositing coating by plasma; device for implementing the method and coating obtained by said method
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United States of America Patent
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app pub date -
Aug 16, 2004
filing date -
Aug 1, 2000
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Abandoned
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Abstract
A device for implementing a method for using low pressure plasma to deposit a coating on an object to be treated, the method including at least two steps: a first step during which reaction fluid is injected into a treatment zone at a first flow rate and under a given pressure, and a second step during which the same reaction fluid is injected into the treatment zone at a second flow rate lower than the first. The device includes a reactive fluid feed device having a source of reactive fluid, a flow regulator valve, and an injector that opens into the treatment area, and a controller that, during the transition between the first and second step, controls the regulator valve to cause a decrease in the flow of reactive fluid delivered to the treatment area.
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