Method of suppressing the effect of shining spots present at the edge of a wafer
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United States of America Patent
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Issued Date -
Jan 20, 2005
app pub date -
Jul 18, 2003
filing date -
Jul 18, 2003
priority date (Note) -
Abandoned
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Abstract
Devices formed in a substrate are protected from shining spots present in a periphery of the substrate. A ring of material is formed on the substrate to separate the periphery of the substrate from a further region of the substrate where the devices are formed.
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