Sputtering device
Number of patents in Portfolio can not be more than 2000
United States of America Patent
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N/A
Issued Date -
Jan 6, 2005
app pub date -
Jun 10, 2004
filing date -
Jun 18, 2003
priority date (Note) -
Abandoned
status (Latency Note)
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Abstract
The invention is, for the purpose of putting on or taking off a target and an earth shield easily without spoiling a vacuum condition, to provide a sputtering device comprising at least a vacuum container, a substrate holder installing in said vacuum container, a substrate set on said substrate holder, a target using opposite to said substrate and a sputtering electrode, wherein: said sputtering electrode is constituted of: an electrode base portion having a first screw portion formed on an outer circumferential surface thereof; an electrode body portion having a second screw portion engaging with said first screw portion and having a third screw portion; a back plate portion having: a fourth screw portion engaging with said third screw portion and installing said target; and an earth shield portion provided around said electrode base portion, said electrode body portion and said back plate portion at a specific space.
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