Photothermal ultra-shallow junction monitoring system with UV pump
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United States of America Patent
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Issued Date -
Dec 16, 2004
app pub date -
Jun 3, 2004
filing date -
Jun 16, 2003
priority date (Note) -
Abandoned
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Abstract
A modulated reflectance measurement system includes two lasers for generating a probe beam and an intensity modulated pump beam. The probe beam is in the visible spectrum and the pump beam is in the ultra-violet spectrum. The pump and probe beams are joined into a collinear beam and focused by an objective lens onto a sample. Reflected energy returns through the objective and is redirected by a beam splitter to a detector. A lock-in amplifier converts the output of the detector to produce quadrature (Q) and in-phase (I) signals for analysis. A processor uses the Q and/or I signals to analyze the sample.
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