Wafer heater with protected heater element
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United States of America Patent
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Issued Date -
Dec 16, 2004
app pub date -
Jun 16, 2003
filing date -
Jun 16, 2003
priority date (Note) -
Abandoned
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Abstract
The present invention satisfies this and other needs by providing a novel wafer heater, which isolates a heater element from the vacuum environment. Thus, a non-aluminum heater element can be used in a wafer heater of the current invention. The novel wafer heater of the invention has an interface with high vacuum integrity, minimal dead space and reduced potential for vacuum contamination.
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