Process boat and shell for wafer processing
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
N/A
Issued Date -
Nov 11, 2004
app pub date -
Jun 9, 2004
filing date -
Jun 28, 2002
priority date (Note) -
Abandoned
status (Latency Note)
Importance
Abstract
In one embodiment, an apparatus for wafer processing comprises a boat and a shell. The shell may be configured to receive and enclose the boat, which in turn may be configured to receive a plurality of wafers. The shell may include a plurality of slots to allow vapor to escape out of the shell and away from the wafers during a temperature ramp down. The apparatus may be employed in a variety of wafer processing applications including in processes for increasing the bulk conductivity of ferroelectric materials, for example.
First Claim
Family
International Classification(s)
Cited Art Landscape
Patent Citation Ranking
Recipient Email Address
Recipient Email Address
Comment
Recipient Email Address
Add to Portfolio(s)
To add this patent to one, or more, of your portfolios, simply click the add button.
This Patent is in these Portfolios:
Add to additional portfolios:
Last Refreshed On:
Changes done successfully