Layered composite and micromechanical sensor element, in particular gas sensor element having said layered composite
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United States of America Patent
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Issued Date -
Oct 28, 2004
app pub date -
Apr 29, 2004
filing date -
Jul 10, 2001
priority date (Note) -
Abandoned
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Abstract
A layered composite with a gas-sensitive layer (15) and a catalytically active layer (16), joined materially to it at least in some regions, is provided, in which the gas-sensitive layer (15) has a first material and the catalytically active layer (16) has both the first material and a catalytically active additive. It is also provided that the specific electrical resistance of the catalytically active layer (16) is higher than that of the gas-sensitive layer (15). In addition, a micromechanical sensor element (5), in particular a gas sensor element, with a dielectric layer (11), a gas-sensitive layer (15) disposed on the dielectric layer, and means (14) for detecting a change in the electrical conductivity of the gas-sensitive layer (15) under the influence of a gas is proposed. It is provided that the surface of the gas-sensitive layer (15) not occupied by the dielectric layer (11) is covered by a catalytically active layer (16), and that the gas-sensitive layer (15) and the catalytically active layer (16) form the proposed layered composite.
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