Methods and apparatus for holding and positioning semiconductor workpieces during electropolishing and/or electroplating of the workpieces
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United States of America Patent
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Issued Date -
Oct 28, 2004
app pub date -
May 25, 2004
filing date -
Sep 8, 1998
priority date (Note) -
Abandoned
status (Latency Note)
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Abstract
A wafer chuck for holding a wafer during electropolishing and/or electroplating of the wafer includes a top section, a bottom section, and a spring member. In accordance with one aspect of the present invention, the top section and the bottom section are configured to receive the wafer for processing. The spring member is disposed on the bottom section and configured to apply an electric charge to the wafer. In accordance with another aspect of the present invention, the spring member contacts a portion of the outer perimeter of the wafer. In one alternative configuration of the present invention, the wafer chuck further includes a seal member to seal the spring member from the electrolyte solution used in the electropolishing and/or electroplating process.
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