Densifying deposited films on an integrated circuit

United States of America Patent

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Issued Date
Oct 7, 2004
app pub date
Apr 1, 2003
filing date
Apr 1, 2003

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Abandoned

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Abstract

Densifying a deposited semiconducting film on a substrate is described. According to one embodiment of the invention, isostatic pressure is used to densify the semiconducting film on the substrate.

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Patent Owner	Address
VARIAN MEDICAL SYSTEMS TECHNOLOGIES INC	3100 HANSEN WAY PALO ALTO CA 94304

International Classification(s)

G01T:MEASUREMENT OF NUCLEAR OR X-RADIATION

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[Patents Count]

Inventor(s)

Inventor Name	Address	# of filed Patents	Total Citations
Bennett, Paul R	Acton, MA	2	12
Dmitriev, Yuri	Brighton, MA	1	1
Klugerman, Mikhail	Acton, MA	4	85
Shah, Kanai S	Newton, MA	52	469
Zentai, George	Mountain View, CA	17	179

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Densifying deposited films on an integrated circuit

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United States of America Patent

10405599

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APP PUB NO	20040195513A1
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10405599

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