Method of self-aligning an oxide aperture with an annular intra-cavity contact in a long wavelength VCSEL
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United States of America Patent
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Jul 12, 2005
Grant Date -
Sep 16, 2004
app pub date -
Mar 29, 2004
filing date -
Jul 6, 2002
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Abstract
A method of forming a vertical cavity surface emitting laser (100, 600, 900) includes process steps for self-aligning the p-type ohmic contact (118, 518, 932), an oxide current aperture (122, 926a), and a central puck of re-phase material (560a, 936) around the optical axis of the laser.
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