System and method for acquiring and processing complex images
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United States of America Patent
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Issued Date -
Sep 16, 2004
app pub date -
Sep 12, 2003
filing date -
Sep 12, 2002
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Abandoned
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Abstract
In digital holographic imaging systems, streamed holograms are compared on a pixel-by-pixel basis for defect detection after hologram generation. An automated image matching, registration and comparison method with feedback confidence allows for runtime wafer inspection, scene matching refinement, rotational wafer alignment and the registration and comparison of difference images.
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