Array for reducing the coherence of a coherent radiation beam

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United States of America Patent

APP PUB NO 20040179364A1
SERIAL NO

10472169

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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The invention relates to an array for reducing the coherence of a coherent radiation beam (6), wherein a reflector (1) defining an inner space is provided with a diffusely reflecting inner surface (4), wherein said reflector (1) has an inlet hole (2) through which the radiation beam (6) can be injected into the inner space, in addition to an outlet hole (3) through which the rays of the radiation beam (6) can come out after at least one reflection on the inner surface (4).

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Patent Owner(s)

Patent OwnerAddress
CARL ZEISSMICROELECTRONIC SYSTEMS GMBHCARL-ZEISS-PROMENADE 10 D-07745 JENA

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
BIschoff, Jorg Ilmenau, DE 5 21
Burkhardt, Matthias Eichenberg, DE 27 58
Erdmann, Lars Horselgau, DE 8 90
Menck, Alexander Jena, DE 4 13
Steiner, Rainhard Stradtroda, DE 1 1

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