Process and apparatus for silicon boat, silicon tubing and other silicon based member fabrication
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United States of America Patent
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Issued Date -
Sep 9, 2004
app pub date -
Mar 19, 2004
filing date -
Sep 19, 2002
priority date (Note) -
Abandoned
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Abstract
Process, apparatus and application of silicon/silicon alloy/silicon compound comprising at least one silicon atom boat, silicon/silicon alloy/silicon compound comprising at least one silicon atom made epitaxial chamber and various silicon/silicon alloy/silicon compound comprising at least one silicon atom made tubing and liners is described here. Powder pressing, plasma and non plasma powder deposition, slurry deposition and slurry casting, silicon/silicon alloy casting and directional solidification are among few methods described here. Silicon/silicon alloy made articles and some of their applications in the wafer processing industry is also described.
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