Device, set and method for carrying a gas or a liquid to a surface through a tube
Number of patents in Portfolio can not be more than 2000
United States of America Patent
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N/A
Issued Date -
Sep 9, 2004
app pub date -
Jun 27, 2003
filing date -
Aug 26, 2000
priority date (Note) -
Abandoned
status (Latency Note)
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Abstract
The invention relates to a device, to a set of tubes and to a method for carrying a gas or a liquid to a surface through a tube, especially in order to produce gas mixtures or to treat the surface using gas lithography. The tube or in the case of a set, each tube of the set has an inlet opening and an outlet opening. A shaft is allocated to each tube, this shaft being arranged in the axial direction of the tube and being displaceable in its longitudinal direction in relation to the tube, from a first position to a second position and vice versa. Each shaft bears a blocking body which blocks or unblocks the outlet when the shaft is in the first or second position. A gas reservoir and a supply line by which means the inside of the gas reservoir is connection to the inlet opening of each tube are also allocated to each tube, so that gas is able to flow from the insider of the gas reservoir into the tube.
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