Method for simulating slurry flow for a grooved polishing pad
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
Sep 20, 2005
Grant Date -
Aug 19, 2004
app pub date -
Feb 14, 2003
filing date -
Feb 14, 2003
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
A method for determining the flow of a fluid (60) in a gap (64) between a pad (48) and a substrate (12) includes the step of utilizing a hybrid Navier-Stokes/lubrication formulation to calculate the flow of the fluid (60) in the gap (64) at a plurality of time steps. The gap (64) can be divided into a plurality of elements (700). The hybrid Navier-Stokes/lubrication formulation can be used to calculate the fluid flow and the pressure of the fluid (60) at each element (700) at the plurality of time steps. Additionally, a method for tracking and estimating the composition of the fluid (60) at various locations in the gap (64) and a material removal rate model that attempts to account for the effects of the fluid flow in the gap (64), the hydrostatic pressure in the gap (64) and the composition of the fluid (60) in the gap (64) are provided herein.
First Claim
Family
International Classification(s)
Cited Art Landscape
Patent Citation Ranking
Recipient Email Address
Recipient Email Address
Comment
Recipient Email Address
Add to Portfolio(s)
To add this patent to one, or more, of your portfolios, simply click the add button.
This Patent is in these Portfolios:
Add to additional portfolios:
Last Refreshed On:
Changes done successfully