Methods of etching articles via micro contact printing

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United States of America Patent

SERIAL NO

10776427

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Abstract

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Improved methods of forming a patterned self-assembled monolayer on a surface and derivative articles are provided. According to one method, an elastomeric stamp is deformed during and/or prior to using the stamp to print a self-assembled molecular monolayer on a surface. According to another method, during monolayer printing the surface is contacted with a liquid that is immiscible with the molecular monolayer-forming species to effect controlled reactive spreading of the monolayer on the surface. Methods of printing self-assembled molecular monolayers on nonplanar surfaces and derivative articles are provided, as are methods of etching surfaces patterned with self-assembled monolayers, including methods of etching silicon. Optical elements including flexible diffraction gratings, mirrors, and lenses are provided, as are methods for forming optical devices and other articles using lithographic molding. A method for controlling the shape of a liquid on the surface of an article is provided, involving applying the liquid to a self-assembled monolayer on the surface, and controlling the electrical potential of the surface.

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Patent Owner(s)

Patent OwnerAddress
PRESIDENT AND FELLOWS OF HARVARD COLLEGE17 QUINCY STREET CAMBRIDGE MA 02138

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Berggren, Karl K Arlington, MA 26 1220
Biebuyck, Hans Rockville, MD 33 1487
Gorman, Christopher B Raleigh, NC 12 673
Jackman, Rebecca J Boston, MA 21 2080
Kim, Enoch Boston, MA 45 2168
Kumar, Amit MilPitas, CA 504 7988
Mrksich, Milan Chicago, IL 47 1658
Prentiss, Mara G Belmont, MA 17 1420
Whitesides, George M Newton, MA 241 11388
Wilbur, James L Germantown, MD 12 784
Xia, Younan Seattle, WA 56 2287

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