Electrostatic actuator and manufacturing method of the same
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United States of America Patent
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Issued Date -
Aug 12, 2004
app pub date -
Feb 5, 2004
filing date -
Feb 12, 2003
priority date (Note) -
Abandoned
status (Latency Note)
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Abstract
An electrostatic actuator for increasing a swing (deflection angle) of a movable structure includes a laminate substrate in which a thin film silicon layer is formed on a silicon substrate through a buried insulating film and a torsion beam movable structure constructed with the thin film silicon layer. A potential difference is generated between a movable side comb-tooth electrode of the movable structure and a fixed side comb-tooth electrode disposed to face the movable side comb-tooth electrode to swing the movable structure. The fixed side comb-tooth electrode is formed in the inside of a through hole bored through the laminate substrate.
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