Importance

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Abstract

The present invention provides a manufacturing apparatus, a method of manufacturing a DLC film coated container and a DLC film coated container which make it possible to form a high-quality DLC film with good productivity on the outer wall surface or the inner wall surface of a container by a film forming mechanism obtained by effectively combining a high-frequency capacitive coupling type discharge system and a microwave discharge system which is different from the film forming mechanism of each method. The manufacturing apparatus (100) of the present invention is an apparatus which forms a DLC film on the outer wall surface of a plastic container (1), and is equipped with a grounded vacuum chamber (2) for housing the plastic container (1), a high-frequency bias electrode (4) which is provided inside the vacuum chamber (2) via an insulating body (3) at a position in contact with the inner wall surface of the plastic container (1) or near the inner wall surface, a microwave supply means (10) which generates a source gas plasma inside the vacuum chamber (2) by introducing microwaves inside the vacuum chamber (2), a high-frequency output supply means (13) connected to the high-frequency bias electrode (4) to generate a self-bias voltage at the outer wall surface of the plastic container (1), and a source gas supply means (18) which introduces a source gas inside the vacuum chamber (2).

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First Claim