Importance

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Abstract

The present invention provides a moisture and gas barrier plastic container with partition plates. In addition, this invention provides a manufacturing apparatus and a method of manufacturing for the container too. The manufacturing apparatus (100) of the present invention is an apparatus which forms a DLC film on inner wall surfaces (3) having an inside/outside relationship with respect to outer wall surfaces (2) of the plastic container equipped with partition plates (1), and partition plate wall surfaces (5) formed by the partition plates by a plasma CVD method. And this apparatus is characterized by having a vacuum chamber (6) which surrounds the plastic container (1) and also serves as an external electrode, a grounded internal electrode (8) which passes through the vacuum chamber (6) and is inserted into the inside of each compartment (7) inside the plastic container (1) formed by the inner wall surfaces (3) and the partition plate wall surfaces (5), a microwave supply means (20) which generates a source gas plasma inside the plastic container (1) by introducing microwaves inside the plastic container (1), a high-frequency output supply means (30) which is connected to the vacuum chamber (6) to generate a self-bias voltage at the inner wall surfaces (3) in order to control the ionic incident energy of the source gas plasma for the inner wall surfaces (3) or the partition plate wall surfaces (5), and a source gas supply means (40) which introduces a source gas into each compartment (7) inside the plastic container (1).

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First Claim