Measuring array
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United States of America Patent
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app pub date -
Mar 15, 2004
filing date -
Sep 24, 2001
priority date (Note) -
Abandoned
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Abstract
In a measurement arrangement comprising a source of radiation (1), a subsequently arranged deflecting device (5), onto which a beam (2) emitted by the source of radiation (1) can be directed and which beam it deflects in different directions in a time-sequential manner, and further comprising first and second optical devices (9, 10) as well as a detector (6), the first optical device (9) deflecting each of the beams coming from the deflecting device (5) as a beam of measurement onto a point (P) on a specimen (11) to be arranged in a position for measurement, so that the angle of incidence of the beam of measurement on the specimen (11) varies as a function of the direction, and wherein specimen beams coming from the specimen due to the interaction of the beams of measurement with the specimen are deflected onto the detector (11) by means of the second optical device (10), at least one of said two optical devices (9, 10) comprises a diffractive element (7) for deflection, by which the beams incident from different directions are diffracted such that the diffracted beams of a predetermined order of diffraction are focussed in one point (P, D).
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