Continuous bleed-and-feed process and equipment
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United States of America Patent
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N/A
Issued Date -
Jul 22, 2004
app pub date -
Oct 31, 2003
filing date -
Nov 5, 2002
priority date (Note) -
Abandoned
status (Latency Note)
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Abstract
A method of performing continuous bleed-and-feed of process solution from and to a holding tank includes the steps of bleeding aged solution from the holding tank to a secondary container, measuring a predetermined amount of the aged solution in the secondary container, disposing the aged solution in the secondary container, filling the secondary container with the predetermined amount of a new solution from a supply tank, and feeding the predetermined amount of the new solution to the holding tank. In one aspect of the invention, the secondary container includes a secondary container tube having a sensor and the measuring step includes sensing the predetermined amount of the aged solution, and shutting a bleed valve for the holding tank in response to sensing the predetermined amount of the aged solution in the secondary container tube. Advantages of the invention include improved control of electrodeposited metal to improve device consistency and yield.
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