Method and device to remove unwanted material from the edge region of a workpiece
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United States of America Patent
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Issued Date -
Jul 8, 2004
app pub date -
Oct 31, 2003
filing date -
Nov 1, 2002
priority date (Note) -
Abandoned
status (Latency Note)
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Abstract
A method of removing edge material from a workpiece includes the steps of supplying an etch solution to create an etchant bead at an opening of an edge removal device, contacting the etchant bead with an edge region of the workpiece, and rotating the workpiece to remove the edge material from the workpiece. In one aspect, the step of supplying the etch solution includes the step of maintaining the etchant bead at the opening of the edge removal device. In another aspect, the edge removal device includes a cavity having the opening and the step of contacting the etchant bead includes inserting the edge region of the workpiece into the cavity.
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