Method for fabricating multilayered thin film PZT structures for small form factors
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United States of America Patent
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Issued Date -
Jul 1, 2004
app pub date -
Dec 27, 2002
filing date -
Dec 27, 2002
priority date (Note) -
Abandoned
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Abstract
An integrated gimbal and PZT structure. The structure includes a substrate, which has a first surface and a second surface. The first surface is opposite to the second surface and sandwiches a thickness of material of the substrate. The structure also includes an isolation layer formed overlying the first surface of the substrate and a patterned layer of PZT material overlying the isolation layer overlying the substrate. A tongue portion is formed from a first portion of the substrate for a gimbal structure of a suspension assembly. A spring portion is formed from a second portion of the substrate. The spring portion is coupled between a lower portion of the suspension assembly and the tongue portion.
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