Inspection tool with partial framing camrea

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United States of America Patent

APP PUB NO 20040109600A1
SERIAL NO

10623283

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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An inspection system, and process for use thereof, allows for inspecting of semiconductors or like substrates with minimal or no wasted image space.

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Patent Owner(s)

Patent OwnerAddress
AUGUST TECHNOLOGY CORP4900 WEST 78TH STREET BLOOMINGTON MN 55435

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Watkins, Cory Chanhassen, MN 30 332

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