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• 15 United States
• 10 France
• 8 Japan
• 7 China
• 5 Korea
• 2 Other

Patent Owner(s)

Patent Owner	Address
AUGUST TECHNOLOGY CORP	4900 WEST 78TH STREET BLOOMINGTON MN 55435

International Classification(s)

• H01L:SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICE....

Inventor(s)

Inventor Name	Address	# of filed Patents	Total Citations
Blair, Alan	St. Paul, MN	24	681
# of filed Patents : 24 Total Citations : 681
Vaughnn, David	Edina, MN	19	122
# of filed Patents : 19 Total Citations : 122
Watkins, Cory	Chanhassen, MN	30	332
# of filed Patents : 30 Total Citations : 332

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Patent Citation Ranking

• 1 Citation Count
• H01L Class

• 1.54 % this patent is cited more than
• 21 Age

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Maintenance Fees

Fee	Large entity fee	small entity fee	micro entity fee	due date

Fee	Large entity fee	small entity fee	micro entity fee
Surcharge after expiration - Late payment is unavoidable	$700.00	$350.00	$175.00
Surcharge after expiration - Late payment is unintentional	$1,640.00	$820.00	$410.00

Full Text

US Patent Application No: 2004/0102,043

Confocal 3D inspection system and process

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Abstract

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A confocal three dimensional inspection system, and process for use thereof, allows for rapid inspecting of bumps and other three dimensional (3D) features on wafers, other semiconductor substrates and other large format micro topographies. The sensor eliminates out of focus light using a confocal principal to create a narrow depth response in the micron range.

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Description

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